EBIC/XPS study of antimony equilibrium segregation at the germanium surface

Research output: Contribution to journalArticle

Abstract

The equilibrium segregation of antimony at Ge surface was investigated using X-ray Photoelectron Spectroscopy (XPS) and Electron Beam Induced Current (EBIC) techniques. XPS\ spectra showed a progressive shift of the germanium lines towards the high binding energies as the duration of the segregation treatment increases. The shift was related to the band bending in the surface region resulting from a high density of surface states. EBIC observations revealed islands of bright contrast covering few micron distance below the surface. The contrast was related to the increase of the depletion region width of the Schottky contact as a result of the dopant segregation.

Original languageEnglish
Pages (from-to)259-264
Number of pages6
JournalDefect and Diffusion Forum
Volume200-202
Publication statusPublished - 1 Jan 2002
Externally publishedYes

Fingerprint

Germanium
Antimony
Induced currents
antimony
Electron beams
germanium
X ray photoelectron spectroscopy
photoelectron spectroscopy
electron beams
x rays
Surface states
Binding energy
shift
Doping (additives)
electric contacts
depletion
coverings
binding energy

Keywords

  • EBIC
  • Germanium
  • Grain boundary
  • Surface segregation
  • XPS

ASJC Scopus subject areas

  • Metals and Alloys

Cite this

EBIC/XPS study of antimony equilibrium segregation at the germanium surface. / Tabet, Nouar.

In: Defect and Diffusion Forum, Vol. 200-202, 01.01.2002, p. 259-264.

Research output: Contribution to journalArticle

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