Dynamics of variable-geometry electrostatic microactuators

F. Najar, S. Choura, E. M. Abdel-Rahman, Sami El-Borgi, A. H. Nayfeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper investigates the dynamic behavior of a microbeam-based electrostatic microactuator. The cross-section of the microbeam under consideration varies along its length. A mathematical model, accounting for the system nonlinearities due to mid-plane stretching and electrostatic forcing, is adopted and used to examine the microbeam dynamics. The Differential Quadrature Method (DQM) and Finite Difference Method (FDM) are used to discretize the partial-differential-integral equation representing the microbeam dynamics. The resulting nonlinear algebraic system is solved for the limit cycles of various microstructure geometries under combined DC-AC loads and the stability of these limit cycles is examined using Floquet theory. Results are presented to show the effect of variations in the geometry on the frequency-response curves of the microactuator. We examine the effect of varying the gap size and the microbeam thickness and width on the frequency-response curves for hardening-type and softening-type behaviors. We found that it is possible to tune the geometry of the microactuator to eliminate dynamic pull-in.

Original languageEnglish
Title of host publicationProceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Applied Mechanics Division
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Print)0791837904, 9780791837900
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Chicago, IL
Duration: 5 Nov 200610 Nov 2006

Other

Other2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
CityChicago, IL
Period5/11/0610/11/06

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ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Najar, F., Choura, S., Abdel-Rahman, E. M., El-Borgi, S., & Nayfeh, A. H. (2006). Dynamics of variable-geometry electrostatic microactuators. In Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Applied Mechanics Division American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2006-14017