Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution

Vassilis Papadakis, Michael A. Everest, Katerina Stamataki, Stylianos Tzortzakis, Benoit Loppinet, T. Peter Rakitzis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Cavity-enhanced ellipsometry, using nanosecond pulsed lasers and without moving parts, is demonstrated to have submicrosecond time resolution. The ellipsometric phase angles are measured from the Fourier transform of the cavity ring-down experimental signals, with a sensitivity 0.01 degrees. The technique is applied to highly reflective surfaces, including total internal reflection, where the samples are placed within the evanescent wave. The technique can be generalized to broadband sources, such as from supercontinuum generation, allowing spectral resolution of thin films and monolayer samples.

Original languageEnglish
Title of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Volume8105
DOIs
Publication statusPublished - 2011
Externally publishedYes
EventInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V - San Diego, CA, United States
Duration: 24 Aug 201125 Aug 2011

Other

OtherInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
CountryUnited States
CitySan Diego, CA
Period24/8/1125/8/11

Fingerprint

Supercontinuum generation
Ellipsometry
Spectral resolution
Pulsed lasers
ellipsometry
Monolayers
Fourier transforms
Cavity
Supercontinuum Generation
Ring
Total Internal Reflection
Evanescent Wave
Thin films
cavities
Pulsed Laser
rings
Spectral Resolution
evanescent waves
spectral resolution
Broadband

Keywords

  • Cavity Ring Down
  • Ellipsometry
  • Evanescent wave

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Papadakis, V., Everest, M. A., Stamataki, K., Tzortzakis, S., Loppinet, B., & Rakitzis, T. P. (2011). Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution. In Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V (Vol. 8105). [81050L] https://doi.org/10.1117/12.903053

Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution. / Papadakis, Vassilis; Everest, Michael A.; Stamataki, Katerina; Tzortzakis, Stylianos; Loppinet, Benoit; Rakitzis, T. Peter.

Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. Vol. 8105 2011. 81050L.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Papadakis, V, Everest, MA, Stamataki, K, Tzortzakis, S, Loppinet, B & Rakitzis, TP 2011, Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution. in Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. vol. 8105, 81050L, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, San Diego, CA, United States, 24/8/11. https://doi.org/10.1117/12.903053
Papadakis V, Everest MA, Stamataki K, Tzortzakis S, Loppinet B, Rakitzis TP. Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution. In Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. Vol. 8105. 2011. 81050L https://doi.org/10.1117/12.903053
Papadakis, Vassilis ; Everest, Michael A. ; Stamataki, Katerina ; Tzortzakis, Stylianos ; Loppinet, Benoit ; Rakitzis, T. Peter. / Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution. Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. Vol. 8105 2011.
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