Development of a multitask and multiinstrument sample transfer system

S. Thevuthasan, D. R. Baer, M. H. Englehard, Y. Liang, J. N. Worthington, T. R. Howard, J. R. Munn, K. S. Rounds

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Abstract

A multiinstrument, multitask UHV sample transfer system being developed for integration with a wide range of synthesis and analysis instruments is described. The specimen transfer capability allows a sample to be synthesized, processed, and characterized by several surface science techniques without exposing the sample to air. Although several types of transfer systems now exist, no existing system has the range of operation desired for a user facility which will be equipped with a wide range of vacuum and controlled atmosphere-based techniques. Three different kinds of sample platens, which can be used in ambient, high-temperature, and surface chemistry experiments, have been designed and tested. The temperature range of the specimen can be as high as 2000 K during heating and as low as 150 K during cooling.

Original languageEnglish
Pages (from-to)1900-1905
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number4
DOIs
Publication statusPublished - Jul 1995
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Thevuthasan, S., Baer, D. R., Englehard, M. H., Liang, Y., Worthington, J. N., Howard, T. R., Munn, J. R., & Rounds, K. S. (1995). Development of a multitask and multiinstrument sample transfer system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 13(4), 1900-1905. https://doi.org/10.1116/1.587832