Design and fabrication of photonic crystals in epitaxial free silicon for ultrathin solar cells

Xianqin Meng, Valerie Depauw, Guillaume Gomard, Ounsi El Daif, Christos Trompoukis, Emmanuel Drouard, Alain Fave, Frederic Dross, Ivan Gordon, Christian Seassal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we present the integration of an absorbing photonic crystal within a thin film photovoltaic solar cell. Optical simulations performed on a complete solar cell revealed that patterning the epitaxial crystalline silicon active layer as a 1D and 2D photonic crystal enabled to increase its integrated absorption by 37% abs and 68% abs between 300 nm and 1100 nm, compared to a similar but unpatterned stack. In order to fabricate such promising cells, a specific fabrication processes based on holographic lithography, inductively coupled plasma etching and reactive ion etching has been developed and implemented to obtain ultrathin patterned solar cells.

Original languageEnglish
Title of host publication2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011
Publication statusPublished - 2011
Externally publishedYes
Event2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011 - Shanghai, China
Duration: 13 Nov 201116 Nov 2011

Other

Other2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011
CountryChina
CityShanghai
Period13/11/1116/11/11

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Keywords

  • Epitaxial crystalline silicon
  • Holographic lithography
  • Photonic crystals
  • Photovoltaics
  • Thin-film devices and applications

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

Cite this

Meng, X., Depauw, V., Gomard, G., El Daif, O., Trompoukis, C., Drouard, E., Fave, A., Dross, F., Gordon, I., & Seassal, C. (2011). Design and fabrication of photonic crystals in epitaxial free silicon for ultrathin solar cells. In 2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011 [6210941]