Design and analysis of a surface micromachined spiral-channel viscous pump

Mohammad I. Kilani, Paul C. Galambos, Yousef Haik, Ching Jen Chen

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model.

Original languageEnglish
Pages (from-to)339-344
Number of pages6
JournalJournal of Fluids Engineering, Transactions of the ASME
Volume125
Issue number2
DOIs
Publication statusPublished - Mar 2003
Externally publishedYes

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Pumps
Surface micromachining
Polysilicon
MEMS
Analytical models
Flow fields

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Design and analysis of a surface micromachined spiral-channel viscous pump. / Kilani, Mohammad I.; Galambos, Paul C.; Haik, Yousef; Chen, Ching Jen.

In: Journal of Fluids Engineering, Transactions of the ASME, Vol. 125, No. 2, 03.2003, p. 339-344.

Research output: Contribution to journalArticle

Kilani, Mohammad I. ; Galambos, Paul C. ; Haik, Yousef ; Chen, Ching Jen. / Design and analysis of a surface micromachined spiral-channel viscous pump. In: Journal of Fluids Engineering, Transactions of the ASME. 2003 ; Vol. 125, No. 2. pp. 339-344.
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