Deposition of amorphous titanium oxide films using alkoxy(pyrazolylborate)titanium(IV) compounds

Elisabeth Charlotte Plappert, Klaus Hermann Dahmen, Roland Hauert, Karl Heinz Ernst

Research output: Contribution to journalArticle

Abstract

ClTi(OiPr)3 reacts with Na[HB(R3R4R5pz)3] (where pz denotes pyrazolyl) to yield volatile isopropoxy(pyrazolylborate)titanium(IV) compounds. Methoxy- and tert-butoxy(pyrazolylborate)titanium(IV) complexes were isolated from the reaction of hydrido(trispyrazolylborate)trichlorotitanate with the sodium alcoholate. Using [HB(pz)3Ti(OiPr)3], thin amorphous TiO2 films were grown by metal organic chemical vapor deposition (MOCVD) in a low pressure reactor, in the temperature range 250-600 °C. The dependence of the growth on evaporation rate, oxygen flow, and substrate temperature is discussed. The influence of different co-reactants on texture and composition of the film, i.e., O2, N2, H2, and O2 with MeOH, was also investigated. The films were characterized by UV-vis and IR spectroscopy, X-ray diffraction (XRD), Auger electron spectroscopy (AES), and X-ray photoelectron spectroscopy (XPS).

Original languageEnglish
Pages (from-to)79-85
Number of pages7
JournalAdvanced Materials
Volume11
Issue number5
Publication statusPublished - 1 Jan 1999
Externally publishedYes

Fingerprint

Titanium compounds
Titanium oxides
Oxide films
Organic Chemicals
Organic chemicals
Amorphous films
Auger electron spectroscopy
Titanium
Ultraviolet spectroscopy
Chemical vapor deposition
Infrared spectroscopy
Evaporation
X ray photoelectron spectroscopy
Textures
Metals
Sodium
Oxygen
X ray diffraction
Thin films
Temperature

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Plappert, E. C., Dahmen, K. H., Hauert, R., & Ernst, K. H. (1999). Deposition of amorphous titanium oxide films using alkoxy(pyrazolylborate)titanium(IV) compounds. Advanced Materials, 11(5), 79-85.

Deposition of amorphous titanium oxide films using alkoxy(pyrazolylborate)titanium(IV) compounds. / Plappert, Elisabeth Charlotte; Dahmen, Klaus Hermann; Hauert, Roland; Ernst, Karl Heinz.

In: Advanced Materials, Vol. 11, No. 5, 01.01.1999, p. 79-85.

Research output: Contribution to journalArticle

Plappert, EC, Dahmen, KH, Hauert, R & Ernst, KH 1999, 'Deposition of amorphous titanium oxide films using alkoxy(pyrazolylborate)titanium(IV) compounds', Advanced Materials, vol. 11, no. 5, pp. 79-85.
Plappert, Elisabeth Charlotte ; Dahmen, Klaus Hermann ; Hauert, Roland ; Ernst, Karl Heinz. / Deposition of amorphous titanium oxide films using alkoxy(pyrazolylborate)titanium(IV) compounds. In: Advanced Materials. 1999 ; Vol. 11, No. 5. pp. 79-85.
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