Conducting transition metal nitride thin films with tailored cell sizes

The case of δ- Tix Ta1-x N

L. E. Koutsokeras, G. Abadias, Ch E. Lekka, Grigorios Matenoglou, D. F. Anagnostopoulos, G. A. Evangelakis, P. Patsalas

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

We present results on the stability and tailoring of the cell size of conducting δ- Tix Ta1-x N obtained by film growth and ab initio calculations. Despite the limited solubility of Ta in Ti, we show that TiN and TaN are soluble due to the hybrization of the d and sp electrons of the metal and N, respectively, that stabilizes the ternary system to the rocksalt structure. The stress-free cell sizes follow the Vegard's rule; nevertheless, process-dependent stresses expand the cell size of the as-grown films. The electronic properties of δ- Tix Ta1-x N films (ρ =180 cm) are similar to those of TiN and TaN.

Original languageEnglish
Article number011904
JournalApplied Physics Letters
Volume93
Issue number1
DOIs
Publication statusPublished - 2008
Externally publishedYes

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metal nitrides
transition metals
conduction
thin films
cells
ternary systems
solubility
electronics
metals
electrons

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Koutsokeras, L. E., Abadias, G., Lekka, C. E., Matenoglou, G., Anagnostopoulos, D. F., Evangelakis, G. A., & Patsalas, P. (2008). Conducting transition metal nitride thin films with tailored cell sizes: The case of δ- Tix Ta1-x N. Applied Physics Letters, 93(1), [011904]. https://doi.org/10.1063/1.2955838

Conducting transition metal nitride thin films with tailored cell sizes : The case of δ- Tix Ta1-x N. / Koutsokeras, L. E.; Abadias, G.; Lekka, Ch E.; Matenoglou, Grigorios; Anagnostopoulos, D. F.; Evangelakis, G. A.; Patsalas, P.

In: Applied Physics Letters, Vol. 93, No. 1, 011904, 2008.

Research output: Contribution to journalArticle

Koutsokeras, LE, Abadias, G, Lekka, CE, Matenoglou, G, Anagnostopoulos, DF, Evangelakis, GA & Patsalas, P 2008, 'Conducting transition metal nitride thin films with tailored cell sizes: The case of δ- Tix Ta1-x N', Applied Physics Letters, vol. 93, no. 1, 011904. https://doi.org/10.1063/1.2955838
Koutsokeras, L. E. ; Abadias, G. ; Lekka, Ch E. ; Matenoglou, Grigorios ; Anagnostopoulos, D. F. ; Evangelakis, G. A. ; Patsalas, P. / Conducting transition metal nitride thin films with tailored cell sizes : The case of δ- Tix Ta1-x N. In: Applied Physics Letters. 2008 ; Vol. 93, No. 1.
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