Composition-dependent changes in the NEXAFS spectra of TiN-Cu films

F. Pinakidou, M. Katsikini, I. Zougrou, Grigorios Matenoglou, P. Patsalas, E. C. Paloura

Research output: Contribution to journalArticle

Abstract

The nanostructure of Ti in TiN-Cu films, grown by pulsed laser deposition, is studied using Ti-K-NEXAFS spectroscopy. The characteristics of the NEXAFS spectra are strongly affected by both the different growth conditions and the Ti concentration in the films. More specifically, the area under the pre-edge peak is strongly correlated with the coordination number of Ti. It is found that in the TiN-Cu films grown from the intermetallic TiCu target, the area under the pre-edge peak decreases as the Ti concentration increases from 50 to 95 at.%. In the films grown from Ti and Cu elemental targets, the area under the pre-edge peak decreases as a function of the nitrogen partial pressure. The detected changes in the pre-edge peak can be attributed to the formation of Ti-Cu bonds.

Original languageEnglish
Pages (from-to)3986-3989
Number of pages4
JournalThin Solid Films
Volume519
Issue number12
DOIs
Publication statusPublished - 1 Apr 2011
Externally publishedYes

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Chemical analysis
X ray absorption near edge structure spectroscopy
Pulsed laser deposition
coordination number
Partial pressure
Intermetallics
pulsed laser deposition
partial pressure
intermetallics
Nanostructures
Nitrogen
nitrogen
spectroscopy

Keywords

  • NEXAFS
  • TiN coatings
  • TiN-Cu nanocomposite films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Pinakidou, F., Katsikini, M., Zougrou, I., Matenoglou, G., Patsalas, P., & Paloura, E. C. (2011). Composition-dependent changes in the NEXAFS spectra of TiN-Cu films. Thin Solid Films, 519(12), 3986-3989. https://doi.org/10.1016/j.tsf.2011.01.186

Composition-dependent changes in the NEXAFS spectra of TiN-Cu films. / Pinakidou, F.; Katsikini, M.; Zougrou, I.; Matenoglou, Grigorios; Patsalas, P.; Paloura, E. C.

In: Thin Solid Films, Vol. 519, No. 12, 01.04.2011, p. 3986-3989.

Research output: Contribution to journalArticle

Pinakidou, F, Katsikini, M, Zougrou, I, Matenoglou, G, Patsalas, P & Paloura, EC 2011, 'Composition-dependent changes in the NEXAFS spectra of TiN-Cu films', Thin Solid Films, vol. 519, no. 12, pp. 3986-3989. https://doi.org/10.1016/j.tsf.2011.01.186
Pinakidou F, Katsikini M, Zougrou I, Matenoglou G, Patsalas P, Paloura EC. Composition-dependent changes in the NEXAFS spectra of TiN-Cu films. Thin Solid Films. 2011 Apr 1;519(12):3986-3989. https://doi.org/10.1016/j.tsf.2011.01.186
Pinakidou, F. ; Katsikini, M. ; Zougrou, I. ; Matenoglou, Grigorios ; Patsalas, P. ; Paloura, E. C. / Composition-dependent changes in the NEXAFS spectra of TiN-Cu films. In: Thin Solid Films. 2011 ; Vol. 519, No. 12. pp. 3986-3989.
@article{b8bd29f6f99b43949eb0631a8c633fa7,
title = "Composition-dependent changes in the NEXAFS spectra of TiN-Cu films",
abstract = "The nanostructure of Ti in TiN-Cu films, grown by pulsed laser deposition, is studied using Ti-K-NEXAFS spectroscopy. The characteristics of the NEXAFS spectra are strongly affected by both the different growth conditions and the Ti concentration in the films. More specifically, the area under the pre-edge peak is strongly correlated with the coordination number of Ti. It is found that in the TiN-Cu films grown from the intermetallic TiCu target, the area under the pre-edge peak decreases as the Ti concentration increases from 50 to 95 at.{\%}. In the films grown from Ti and Cu elemental targets, the area under the pre-edge peak decreases as a function of the nitrogen partial pressure. The detected changes in the pre-edge peak can be attributed to the formation of Ti-Cu bonds.",
keywords = "NEXAFS, TiN coatings, TiN-Cu nanocomposite films",
author = "F. Pinakidou and M. Katsikini and I. Zougrou and Grigorios Matenoglou and P. Patsalas and Paloura, {E. C.}",
year = "2011",
month = "4",
day = "1",
doi = "10.1016/j.tsf.2011.01.186",
language = "English",
volume = "519",
pages = "3986--3989",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "12",

}

TY - JOUR

T1 - Composition-dependent changes in the NEXAFS spectra of TiN-Cu films

AU - Pinakidou, F.

AU - Katsikini, M.

AU - Zougrou, I.

AU - Matenoglou, Grigorios

AU - Patsalas, P.

AU - Paloura, E. C.

PY - 2011/4/1

Y1 - 2011/4/1

N2 - The nanostructure of Ti in TiN-Cu films, grown by pulsed laser deposition, is studied using Ti-K-NEXAFS spectroscopy. The characteristics of the NEXAFS spectra are strongly affected by both the different growth conditions and the Ti concentration in the films. More specifically, the area under the pre-edge peak is strongly correlated with the coordination number of Ti. It is found that in the TiN-Cu films grown from the intermetallic TiCu target, the area under the pre-edge peak decreases as the Ti concentration increases from 50 to 95 at.%. In the films grown from Ti and Cu elemental targets, the area under the pre-edge peak decreases as a function of the nitrogen partial pressure. The detected changes in the pre-edge peak can be attributed to the formation of Ti-Cu bonds.

AB - The nanostructure of Ti in TiN-Cu films, grown by pulsed laser deposition, is studied using Ti-K-NEXAFS spectroscopy. The characteristics of the NEXAFS spectra are strongly affected by both the different growth conditions and the Ti concentration in the films. More specifically, the area under the pre-edge peak is strongly correlated with the coordination number of Ti. It is found that in the TiN-Cu films grown from the intermetallic TiCu target, the area under the pre-edge peak decreases as the Ti concentration increases from 50 to 95 at.%. In the films grown from Ti and Cu elemental targets, the area under the pre-edge peak decreases as a function of the nitrogen partial pressure. The detected changes in the pre-edge peak can be attributed to the formation of Ti-Cu bonds.

KW - NEXAFS

KW - TiN coatings

KW - TiN-Cu nanocomposite films

UR - http://www.scopus.com/inward/record.url?scp=79953711408&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953711408&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2011.01.186

DO - 10.1016/j.tsf.2011.01.186

M3 - Article

VL - 519

SP - 3986

EP - 3989

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 12

ER -