Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films

P. S. Patil, E. A. Ennaoui, C. D. Lokhande, M. Müller, M. Giersig, K. Diesner, H. Tributsch

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30 Citations (Scopus)

Abstract

The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190°C substrate temperature and further annealed at 350°C for 30 min in air. The films were 0.22 μ thick and black grey in color. The structural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measurement was carried out to calculate the decay time of excess charge carriers in ruthenium oxide thin films.

Original languageEnglish
Pages (from-to)57-62
Number of pages6
JournalThin Solid Films
Volume310
Issue number1-2
Publication statusPublished - 21 Nov 1997
Externally publishedYes

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Keywords

  • Ruthenium oxide
  • Thin films
  • Ultrasonic spray pyrolysis

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Patil, P. S., Ennaoui, E. A., Lokhande, C. D., Müller, M., Giersig, M., Diesner, K., & Tributsch, H. (1997). Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films. Thin Solid Films, 310(1-2), 57-62.