Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films

P. S. Patil, E. A. Ennaoui, C. D. Lokhande, M. Müller, M. Giersig, K. Diesner, H. Tributsch

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190°C substrate temperature and further annealed at 350°C for 30 min in air. The films were 0.22 μ thick and black grey in color. The structural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measurement was carried out to calculate the decay time of excess charge carriers in ruthenium oxide thin films.

Original languageEnglish
Pages (from-to)57-62
Number of pages6
JournalThin Solid Films
Volume310
Issue number1-2
Publication statusPublished - 21 Nov 1997
Externally publishedYes

Fingerprint

Ruthenium
ruthenium
Oxide films
sprayers
ultrasonics
Ultrasonics
Thin films
oxides
thin films
Spray pyrolysis
Photoconductivity
Charge carriers
photoconductivity
pyrolysis
Structural properties
charge carriers
Deposits
Optical properties
deposits
Color

Keywords

  • Ruthenium oxide
  • Thin films
  • Ultrasonic spray pyrolysis

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Patil, P. S., Ennaoui, E. A., Lokhande, C. D., Müller, M., Giersig, M., Diesner, K., & Tributsch, H. (1997). Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films. Thin Solid Films, 310(1-2), 57-62.

Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films. / Patil, P. S.; Ennaoui, E. A.; Lokhande, C. D.; Müller, M.; Giersig, M.; Diesner, K.; Tributsch, H.

In: Thin Solid Films, Vol. 310, No. 1-2, 21.11.1997, p. 57-62.

Research output: Contribution to journalArticle

Patil, PS, Ennaoui, EA, Lokhande, CD, Müller, M, Giersig, M, Diesner, K & Tributsch, H 1997, 'Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films', Thin Solid Films, vol. 310, no. 1-2, pp. 57-62.
Patil PS, Ennaoui EA, Lokhande CD, Müller M, Giersig M, Diesner K et al. Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films. Thin Solid Films. 1997 Nov 21;310(1-2):57-62.
Patil, P. S. ; Ennaoui, E. A. ; Lokhande, C. D. ; Müller, M. ; Giersig, M. ; Diesner, K. ; Tributsch, H. / Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films. In: Thin Solid Films. 1997 ; Vol. 310, No. 1-2. pp. 57-62.
@article{bf2bdd8504a84f8da42db9fdfb269c59,
title = "Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films",
abstract = "The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190°C substrate temperature and further annealed at 350°C for 30 min in air. The films were 0.22 μ thick and black grey in color. The structural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measurement was carried out to calculate the decay time of excess charge carriers in ruthenium oxide thin films.",
keywords = "Ruthenium oxide, Thin films, Ultrasonic spray pyrolysis",
author = "Patil, {P. S.} and Ennaoui, {E. A.} and Lokhande, {C. D.} and M. M{\"u}ller and M. Giersig and K. Diesner and H. Tributsch",
year = "1997",
month = "11",
day = "21",
language = "English",
volume = "310",
pages = "57--62",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1-2",

}

TY - JOUR

T1 - Characterization of ultrasonic spray pyrolysed ruthenium oxide thin films

AU - Patil, P. S.

AU - Ennaoui, E. A.

AU - Lokhande, C. D.

AU - Müller, M.

AU - Giersig, M.

AU - Diesner, K.

AU - Tributsch, H.

PY - 1997/11/21

Y1 - 1997/11/21

N2 - The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190°C substrate temperature and further annealed at 350°C for 30 min in air. The films were 0.22 μ thick and black grey in color. The structural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measurement was carried out to calculate the decay time of excess charge carriers in ruthenium oxide thin films.

AB - The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190°C substrate temperature and further annealed at 350°C for 30 min in air. The films were 0.22 μ thick and black grey in color. The structural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measurement was carried out to calculate the decay time of excess charge carriers in ruthenium oxide thin films.

KW - Ruthenium oxide

KW - Thin films

KW - Ultrasonic spray pyrolysis

UR - http://www.scopus.com/inward/record.url?scp=0031274898&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031274898&partnerID=8YFLogxK

M3 - Article

VL - 310

SP - 57

EP - 62

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-2

ER -