Characterization of integrated tin oxide gas sensors with metal additives and ion implantations

Bin Guo, Amine Bermak, Philip C H Chan, Gui Zhen Yan

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.

Original languageEnglish
Article number4567518
Pages (from-to)1397-1398
Number of pages2
JournalIEEE Sensors Journal
Volume8
Issue number8
DOIs
Publication statusPublished - Aug 2008
Externally publishedYes

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Keywords

  • Array
  • Drift
  • Post-treatment
  • Tin oxide

ASJC Scopus subject areas

  • Engineering(all)
  • Electrical and Electronic Engineering

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