Characterization of integrated tin oxide gas sensors with metal additives and ion implantations

Bin Guo, Amine Bermak, Philip C H Chan, Gui Zhen Yan

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.

Original languageEnglish
Article number4567518
Pages (from-to)1397-1398
Number of pages2
JournalIEEE Sensors Journal
Volume8
Issue number8
DOIs
Publication statusPublished - Aug 2008
Externally publishedYes

Fingerprint

Tin oxides
Chemical sensors
Ion implantation
tin oxides
ion implantation
implantation
Sensor arrays
sensors
Metals
gases
metals
Sensors
selectivity
chips
Gases

Keywords

  • Array
  • Drift
  • Post-treatment
  • Tin oxide

ASJC Scopus subject areas

  • Engineering(all)
  • Electrical and Electronic Engineering

Cite this

Characterization of integrated tin oxide gas sensors with metal additives and ion implantations. / Guo, Bin; Bermak, Amine; Chan, Philip C H; Yan, Gui Zhen.

In: IEEE Sensors Journal, Vol. 8, No. 8, 4567518, 08.2008, p. 1397-1398.

Research output: Contribution to journalArticle

Guo, Bin ; Bermak, Amine ; Chan, Philip C H ; Yan, Gui Zhen. / Characterization of integrated tin oxide gas sensors with metal additives and ion implantations. In: IEEE Sensors Journal. 2008 ; Vol. 8, No. 8. pp. 1397-1398.
@article{d035f9e155e046de8312359f256a8a1a,
title = "Characterization of integrated tin oxide gas sensors with metal additives and ion implantations",
abstract = "Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.",
keywords = "Array, Drift, Post-treatment, Tin oxide",
author = "Bin Guo and Amine Bermak and Chan, {Philip C H} and Yan, {Gui Zhen}",
year = "2008",
month = "8",
doi = "10.1109/JSEN.2008.920708",
language = "English",
volume = "8",
pages = "1397--1398",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "8",

}

TY - JOUR

T1 - Characterization of integrated tin oxide gas sensors with metal additives and ion implantations

AU - Guo, Bin

AU - Bermak, Amine

AU - Chan, Philip C H

AU - Yan, Gui Zhen

PY - 2008/8

Y1 - 2008/8

N2 - Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.

AB - Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.

KW - Array

KW - Drift

KW - Post-treatment

KW - Tin oxide

UR - http://www.scopus.com/inward/record.url?scp=47849110913&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47849110913&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2008.920708

DO - 10.1109/JSEN.2008.920708

M3 - Article

VL - 8

SP - 1397

EP - 1398

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

SN - 1530-437X

IS - 8

M1 - 4567518

ER -