Carbon analysis using energetic ion beams

W. Jiang, V. Shutthanandan, S. Thevuthasan, D. E. McCready, W. J. Weber

Research output: Contribution to journalArticle

15 Citations (Scopus)


Both nuclear reaction analysis and non-Rutherford elastic scattering have been widely used for analysis of light elements in solids; these two ion-beam methods complement more traditional analysis by Rutherford backscattering spectrometry. In this study, the reaction/scattering cross sections for 12C(p,p)12C, 12C(d,p)13C and 12C(α,α)12C at an angle of 150° are measured over relevant energy regions using thin films of carbon (5.8 μg/cm2) on silicate glass. The results are plotted and tabulated as a function of ion energy, with typical uncertainties of 4% for the cross section data. In addition, the angular distribution of the cross sections for the reaction 12C(d,p)13C at an ion energy of 0.94 MeV has also been determined from 100° to 170°. An example for the application of this reaction to SiC is given.

Original languageEnglish
Pages (from-to)538-546
Number of pages9
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number3-4
Publication statusPublished - Aug 2004
Externally publishedYes



  • Carbon analysis
  • Energetic ion beams
  • Reaction/scattering cross section

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

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