Application of vacuum deposition methods to solid oxide fuel cells

L. R. Pederson, P. Singh, X. D. Zhou

Research output: Contribution to journalArticle

95 Citations (Scopus)

Abstract

The application of vacuum deposition techniques to the fabrication of solid oxide fuel cell (SOFC) materials and structures are reviewed, focusing on magnetron sputtering, vacuum plasma methods, laser ablation, and electrochemical vapor deposition. A description of each method and examples of use to produce electrolytes, electrodes, and/or electrical interconnects are given. Generally high equipment costs and relatively low deposition rates have limited the use of vacuum deposition methods in SOFC manufacture, with a few notable exceptions. Vacuum methods are particularly promising in the fabrication of micro-fuel cells, where thin films of high quality and unusual configuration are desired.

Original languageEnglish
Pages (from-to)1066-1083
Number of pages18
JournalVacuum
Volume80
Issue number10
DOIs
Publication statusPublished - 3 Aug 2006
Externally publishedYes

Fingerprint

Vacuum deposition
vacuum deposition
solid oxide fuel cells
Solid oxide fuel cells (SOFC)
Vacuum
Fabrication
vacuum
fabrication
Vapor deposition
Laser ablation
Deposition rates
Magnetron sputtering
Electrolytes
laser ablation
fuel cells
Fuel cells
magnetron sputtering
vapor deposition
electrolytes
costs

Keywords

  • Electrochemical vapor deposition
  • Laser ablation
  • Magnetron sputtering
  • Solid oxide fuel cell
  • Vacuum plasma deposition

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Application of vacuum deposition methods to solid oxide fuel cells. / Pederson, L. R.; Singh, P.; Zhou, X. D.

In: Vacuum, Vol. 80, No. 10, 03.08.2006, p. 1066-1083.

Research output: Contribution to journalArticle

Pederson, LR, Singh, P & Zhou, XD 2006, 'Application of vacuum deposition methods to solid oxide fuel cells', Vacuum, vol. 80, no. 10, pp. 1066-1083. https://doi.org/10.1016/j.vacuum.2006.01.072
Pederson, L. R. ; Singh, P. ; Zhou, X. D. / Application of vacuum deposition methods to solid oxide fuel cells. In: Vacuum. 2006 ; Vol. 80, No. 10. pp. 1066-1083.
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