An Optical Study of PZT Thin Film Capacitors

C. R. Peterson, S. A. Mansour, A. Bement

Research output: Contribution to journalArticle

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Abstract

PZT thin film capacitors with the composition Pb(Zr0.53 Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.

Original languageEnglish
Pages (from-to)295-300
Number of pages6
JournalIntegrated Ferroelectrics
Volume10
Issue number1-4
DOIs
Publication statusPublished - 1 Oct 1995

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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