PZT thin film capacitors with the composition Pb(Zr0.53 Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry