An Optical Study of PZT Thin Film Capacitors

C. R. Peterson, Said Mansour, A. Bement

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

PZT thin film capacitors with the composition Pb(Zr0.53 Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.

Original languageEnglish
Pages (from-to)295-300
Number of pages6
JournalIntegrated Ferroelectrics
Volume10
Issue number1-4
DOIs
Publication statusPublished - 1 Oct 1995
Externally publishedYes

Fingerprint

capacitors
Capacitors
Polarization
Fatigue testing
thin films
Photons
polarization
Decomposition
Substrates
Chemical analysis
saturation
decomposition
photons
Temperature
Film capacitor
temperature
energy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Condensed Matter Physics
  • Materials Chemistry
  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites

Cite this

An Optical Study of PZT Thin Film Capacitors. / Peterson, C. R.; Mansour, Said; Bement, A.

In: Integrated Ferroelectrics, Vol. 10, No. 1-4, 01.10.1995, p. 295-300.

Research output: Contribution to journalArticle

Peterson, C. R. ; Mansour, Said ; Bement, A. / An Optical Study of PZT Thin Film Capacitors. In: Integrated Ferroelectrics. 1995 ; Vol. 10, No. 1-4. pp. 295-300.
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