An evanescent-mode cavity resonator based thermal sensor

Aamer Mahmoud, Hjalti H. Sigmarsson, Himanshu Joshi, William J. Chappell, Dimitrios Peroulis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

This paper reports the use of an evanescent-mode cavity resonator as a temperature sensor. The frequency loading is achieved by a capacitive post in the center of the cavity confining the electric field in a small volume. The resonant frequency of a loaded evanescent-mode cavity is related to the capacitance of the loading mechanism. As a sensing mechanism, a rectangular array of thermally actuated bilayered microcantilever beams on a silicon substrate has been fabricated using conventional microfabrication processes and placed inside the resonator. A temperature change causes the microcantilevers to deflect, changing the parasitic capacitance of the cavity and hence the resonant frequency of the resonator. Loaded microwave cavities have been fabricated using a layer by layer stereolithographic process and then metallized. The Si hosting the cantilevers is attached to the cavity. The resonant frequency of the sensor is monitored as a function of temperature and varies from 11.34 GHz at room temperature to 12 GHz at 90°C. At room temperature, the sensor has a Temperature Coefficient of Frequency (TCF) of 0.029%/°C.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Pages950-953
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 28 Oct 200731 Oct 2007

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period28/10/0731/10/07

Fingerprint

Cavity resonators
Sensors
Natural frequencies
Resonators
Capacitance
Temperature
Microfabrication
Temperature sensors
Microwaves
Electric fields
Hot Temperature
Silicon
Substrates

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Mahmoud, A., Sigmarsson, H. H., Joshi, H., Chappell, W. J., & Peroulis, D. (2007). An evanescent-mode cavity resonator based thermal sensor. In Proceedings of IEEE Sensors (pp. 950-953). [4388560] https://doi.org/10.1109/ICSENS.2007.4388560

An evanescent-mode cavity resonator based thermal sensor. / Mahmoud, Aamer; Sigmarsson, Hjalti H.; Joshi, Himanshu; Chappell, William J.; Peroulis, Dimitrios.

Proceedings of IEEE Sensors. 2007. p. 950-953 4388560.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mahmoud, A, Sigmarsson, HH, Joshi, H, Chappell, WJ & Peroulis, D 2007, An evanescent-mode cavity resonator based thermal sensor. in Proceedings of IEEE Sensors., 4388560, pp. 950-953, 6th IEEE Conference on SENSORS, IEEE SENSORS 2007, Atlanta, GA, United States, 28/10/07. https://doi.org/10.1109/ICSENS.2007.4388560
Mahmoud A, Sigmarsson HH, Joshi H, Chappell WJ, Peroulis D. An evanescent-mode cavity resonator based thermal sensor. In Proceedings of IEEE Sensors. 2007. p. 950-953. 4388560 https://doi.org/10.1109/ICSENS.2007.4388560
Mahmoud, Aamer ; Sigmarsson, Hjalti H. ; Joshi, Himanshu ; Chappell, William J. ; Peroulis, Dimitrios. / An evanescent-mode cavity resonator based thermal sensor. Proceedings of IEEE Sensors. 2007. pp. 950-953
@inproceedings{8bd2ac01117d437585a0daae3693ed8f,
title = "An evanescent-mode cavity resonator based thermal sensor",
abstract = "This paper reports the use of an evanescent-mode cavity resonator as a temperature sensor. The frequency loading is achieved by a capacitive post in the center of the cavity confining the electric field in a small volume. The resonant frequency of a loaded evanescent-mode cavity is related to the capacitance of the loading mechanism. As a sensing mechanism, a rectangular array of thermally actuated bilayered microcantilever beams on a silicon substrate has been fabricated using conventional microfabrication processes and placed inside the resonator. A temperature change causes the microcantilevers to deflect, changing the parasitic capacitance of the cavity and hence the resonant frequency of the resonator. Loaded microwave cavities have been fabricated using a layer by layer stereolithographic process and then metallized. The Si hosting the cantilevers is attached to the cavity. The resonant frequency of the sensor is monitored as a function of temperature and varies from 11.34 GHz at room temperature to 12 GHz at 90°C. At room temperature, the sensor has a Temperature Coefficient of Frequency (TCF) of 0.029{\%}/°C.",
author = "Aamer Mahmoud and Sigmarsson, {Hjalti H.} and Himanshu Joshi and Chappell, {William J.} and Dimitrios Peroulis",
year = "2007",
doi = "10.1109/ICSENS.2007.4388560",
language = "English",
isbn = "1424412617",
pages = "950--953",
booktitle = "Proceedings of IEEE Sensors",

}

TY - GEN

T1 - An evanescent-mode cavity resonator based thermal sensor

AU - Mahmoud, Aamer

AU - Sigmarsson, Hjalti H.

AU - Joshi, Himanshu

AU - Chappell, William J.

AU - Peroulis, Dimitrios

PY - 2007

Y1 - 2007

N2 - This paper reports the use of an evanescent-mode cavity resonator as a temperature sensor. The frequency loading is achieved by a capacitive post in the center of the cavity confining the electric field in a small volume. The resonant frequency of a loaded evanescent-mode cavity is related to the capacitance of the loading mechanism. As a sensing mechanism, a rectangular array of thermally actuated bilayered microcantilever beams on a silicon substrate has been fabricated using conventional microfabrication processes and placed inside the resonator. A temperature change causes the microcantilevers to deflect, changing the parasitic capacitance of the cavity and hence the resonant frequency of the resonator. Loaded microwave cavities have been fabricated using a layer by layer stereolithographic process and then metallized. The Si hosting the cantilevers is attached to the cavity. The resonant frequency of the sensor is monitored as a function of temperature and varies from 11.34 GHz at room temperature to 12 GHz at 90°C. At room temperature, the sensor has a Temperature Coefficient of Frequency (TCF) of 0.029%/°C.

AB - This paper reports the use of an evanescent-mode cavity resonator as a temperature sensor. The frequency loading is achieved by a capacitive post in the center of the cavity confining the electric field in a small volume. The resonant frequency of a loaded evanescent-mode cavity is related to the capacitance of the loading mechanism. As a sensing mechanism, a rectangular array of thermally actuated bilayered microcantilever beams on a silicon substrate has been fabricated using conventional microfabrication processes and placed inside the resonator. A temperature change causes the microcantilevers to deflect, changing the parasitic capacitance of the cavity and hence the resonant frequency of the resonator. Loaded microwave cavities have been fabricated using a layer by layer stereolithographic process and then metallized. The Si hosting the cantilevers is attached to the cavity. The resonant frequency of the sensor is monitored as a function of temperature and varies from 11.34 GHz at room temperature to 12 GHz at 90°C. At room temperature, the sensor has a Temperature Coefficient of Frequency (TCF) of 0.029%/°C.

UR - http://www.scopus.com/inward/record.url?scp=48349140566&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=48349140566&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2007.4388560

DO - 10.1109/ICSENS.2007.4388560

M3 - Conference contribution

SN - 1424412617

SN - 9781424412617

SP - 950

EP - 953

BT - Proceedings of IEEE Sensors

ER -