A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Wei Xu, Beiqi Lijin, Mingzheng Duan, Xiaoyi Wang, Jeffry Wicaksana, A. Min, Moaaz Ahmed, Ruijin Wang, Nicholas Xuanlai Fang, Amine Bermak, Yi Kuen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages824-827
Number of pages4
Volume2018-January
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 24 Apr 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period21/1/1825/1/18

Fingerprint

microelectromechanical systems
MEMS
CMOS
sensors
Sensors
Flow of gases
Hot Temperature
gas flow
Monitoring
Costs

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Xu, W., Lijin, B., Duan, M., Wang, X., Wicaksana, J., Min, A., ... Lee, Y. K. (2018). A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (Vol. 2018-January, pp. 824-827). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346682

A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. / Xu, Wei; Lijin, Beiqi; Duan, Mingzheng; Wang, Xiaoyi; Wicaksana, Jeffry; Min, A.; Ahmed, Moaaz; Wang, Ruijin; Fang, Nicholas Xuanlai; Bermak, Amine; Lee, Yi Kuen.

2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Vol. 2018-January Institute of Electrical and Electronics Engineers Inc., 2018. p. 824-827.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xu, W, Lijin, B, Duan, M, Wang, X, Wicaksana, J, Min, A, Ahmed, M, Wang, R, Fang, NX, Bermak, A & Lee, YK 2018, A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 824-827, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/1/18. https://doi.org/10.1109/MEMSYS.2018.8346682
Xu W, Lijin B, Duan M, Wang X, Wicaksana J, Min A et al. A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Vol. 2018-January. Institute of Electrical and Electronics Engineers Inc. 2018. p. 824-827 https://doi.org/10.1109/MEMSYS.2018.8346682
Xu, Wei ; Lijin, Beiqi ; Duan, Mingzheng ; Wang, Xiaoyi ; Wicaksana, Jeffry ; Min, A. ; Ahmed, Moaaz ; Wang, Ruijin ; Fang, Nicholas Xuanlai ; Bermak, Amine ; Lee, Yi Kuen. / A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Vol. 2018-January Institute of Electrical and Electronics Engineers Inc., 2018. pp. 824-827
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abstract = "In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2{\%} with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.",
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