A surface micromachined spiral-channel viscous pump

Mohammad I. Kilani, Paul C. Galambos, Yousef Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The paper introduces a new viscous pump, called the spiral pump, which targets surface micromachining, and outlines its implementation in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT). For the purpose of analyzing the flow field in the pump, the spiral channel is approximated as an equivalent straight channel. After demonstrating the validity of this approximation for typical design, the paper presents a lubrication solution of the flow field in the channel, which is used to relate the flow rate, torque and power to rotation rate and pressure head. Experimental flow rate versus pressure data obtained from a scaled up spiral pump prototype are compared with analytical predictions, highlighting needed research efforts in modeling and analysis of the spiral pump.

Original languageEnglish
Title of host publicationFluids Engineering
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages469-475
Number of pages7
ISBN (Print)0791836576, 9780791836576
DOIs
Publication statusPublished - 2002
Externally publishedYes

    Fingerprint

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Kilani, M. I., Galambos, P. C., Haik, Y., & Chen, C. J. (2002). A surface micromachined spiral-channel viscous pump. In Fluids Engineering (pp. 469-475). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33667