A novel method for the fabrication of a high-density carbon nanotube microelectrode array

Adam Khalifa, Zhaoli Gao, Amine Bermak, Yi Wang, Leanne Lai Hang Chan

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We present a novel method for fabricating a high-density carbon nanotube microelectrode array (MEA) chip. Vertically aligned carbon nanotubes (VACNTs) were synthesized by microwave plasma-enhanced chemical vapor deposition and thermal chemical vapor deposition. The device was characterized using electrochemical experiments such as cyclic voltammetry, impedance spectroscopy and potential transient measurements. Through-silicon vias (TSVs) were fabricated and partially filled with polycrystalline silicon to allow electrical connection from the high-density electrodes to a stimulator microchip. In response to the demand for higher resolution implants, we have developed a unique process to obtain a high-density electrode array by making the microelectrodes smaller in size and designing new ways of routing the electrodes to current sources.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalSensing and Bio-Sensing Research
Volume5
DOIs
Publication statusPublished - 1 Sep 2015
Externally publishedYes

Fingerprint

Carbon Nanotubes
Microelectrodes
Carbon nanotubes
Electrodes
Silicon
Fabrication
Dielectric Spectroscopy
Plasma enhanced chemical vapor deposition
Microwaves
Polysilicon
Cyclic voltammetry
Chemical vapor deposition
Hot Temperature
Spectroscopy
Equipment and Supplies
Experiments

Keywords

  • Carbon nanotubes
  • Microelectrode array
  • Microfabrication
  • Neural implant
  • Through-silicon via interconnects

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biotechnology
  • Signal Processing
  • Electrical and Electronic Engineering

Cite this

A novel method for the fabrication of a high-density carbon nanotube microelectrode array. / Khalifa, Adam; Gao, Zhaoli; Bermak, Amine; Wang, Yi; Hang Chan, Leanne Lai.

In: Sensing and Bio-Sensing Research, Vol. 5, 01.09.2015, p. 1-7.

Research output: Contribution to journalArticle

Khalifa, Adam ; Gao, Zhaoli ; Bermak, Amine ; Wang, Yi ; Hang Chan, Leanne Lai. / A novel method for the fabrication of a high-density carbon nanotube microelectrode array. In: Sensing and Bio-Sensing Research. 2015 ; Vol. 5. pp. 1-7.
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