A novel method for the fabrication of a high-density carbon nanotube microelectrode array

Adam Khalifa, Zhaoli Gao, Amine Bermak, Yi Wang, Leanne Lai Hang Chan

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We present a novel method for fabricating a high-density carbon nanotube microelectrode array (MEA) chip. Vertically aligned carbon nanotubes (VACNTs) were synthesized by microwave plasma-enhanced chemical vapor deposition and thermal chemical vapor deposition. The device was characterized using electrochemical experiments such as cyclic voltammetry, impedance spectroscopy and potential transient measurements. Through-silicon vias (TSVs) were fabricated and partially filled with polycrystalline silicon to allow electrical connection from the high-density electrodes to a stimulator microchip. In response to the demand for higher resolution implants, we have developed a unique process to obtain a high-density electrode array by making the microelectrodes smaller in size and designing new ways of routing the electrodes to current sources.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalSensing and Bio-Sensing Research
Volume5
DOIs
Publication statusPublished - 1 Sep 2015
Externally publishedYes

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Keywords

  • Carbon nanotubes
  • Microelectrode array
  • Microfabrication
  • Neural implant
  • Through-silicon via interconnects

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biotechnology
  • Signal Processing
  • Electrical and Electronic Engineering

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