A low-cost micro BTU sensor system fabricated by CMOS MEMS technology

Wei Xu, Mingzheng Duan, Moaaz Ahmed, Saqib Mohamad, Amine Bermak, Yi Kuen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An integrated low-cost micro BTU (μΒΤυ) sensor system, including a thermoresistive micro calorimetric flow (TMCF) sensor and a resistance temperature detector (RTD), is reported for the first time using a proprietary InvenSense CMOS MEMS technology integrated with a digital signal processing (DSP) unit. The proposed BTU sensor features an integrated micro-channel enabling the simultaneous measurement of fluid temperature and flow rates with a sensitivity of 11.1Ω/°C and 0.33 mV/sccm, respectively. This μBTU system achieves a range of 1.5∼15 milli-BTU/h and an accuracy less than 6%. The performance achieved by the μBTU device combined with its high level of integration and low-cost makes it possible to deploy as a sensing node in Internet of Things (IoT) for energy monitoring in smart buildings.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages406-409
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period18/6/1722/6/17

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Keywords

  • CMOS MEMS
  • Micro BTU (μBTU) Sensor
  • RTD
  • TMCF Sensor

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Xu, W., Duan, M., Ahmed, M., Mohamad, S., Bermak, A., & Lee, Y. K. (2017). A low-cost micro BTU sensor system fabricated by CMOS MEMS technology. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 406-409). [7994073] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994073