A low-cost micro BTU sensor system fabricated by CMOS MEMS technology

Wei Xu, Mingzheng Duan, Moaaz Ahmed, Saqib Mohamad, Amine Bermak, Yi Kuen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An integrated low-cost micro BTU (μΒΤυ) sensor system, including a thermoresistive micro calorimetric flow (TMCF) sensor and a resistance temperature detector (RTD), is reported for the first time using a proprietary InvenSense CMOS MEMS technology integrated with a digital signal processing (DSP) unit. The proposed BTU sensor features an integrated micro-channel enabling the simultaneous measurement of fluid temperature and flow rates with a sensitivity of 11.1Ω/°C and 0.33 mV/sccm, respectively. This μBTU system achieves a range of 1.5∼15 milli-BTU/h and an accuracy less than 6%. The performance achieved by the μBTU device combined with its high level of integration and low-cost makes it possible to deploy as a sensing node in Internet of Things (IoT) for energy monitoring in smart buildings.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages406-409
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period18/6/1722/6/17

Fingerprint

microelectromechanical systems
MEMS
CMOS
sensors
Sensors
Intelligent buildings
Costs
Digital signal processing
signal processing
flow velocity
Flow rate
Detectors
Temperature
Fluids
temperature
Monitoring
fluids
sensitivity
detectors
energy

Keywords

  • CMOS MEMS
  • Micro BTU (μBTU) Sensor
  • RTD
  • TMCF Sensor

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Xu, W., Duan, M., Ahmed, M., Mohamad, S., Bermak, A., & Lee, Y. K. (2017). A low-cost micro BTU sensor system fabricated by CMOS MEMS technology. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 406-409). [7994073] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994073

A low-cost micro BTU sensor system fabricated by CMOS MEMS technology. / Xu, Wei; Duan, Mingzheng; Ahmed, Moaaz; Mohamad, Saqib; Bermak, Amine; Lee, Yi Kuen.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 406-409 7994073.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xu, W, Duan, M, Ahmed, M, Mohamad, S, Bermak, A & Lee, YK 2017, A low-cost micro BTU sensor system fabricated by CMOS MEMS technology. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994073, Institute of Electrical and Electronics Engineers Inc., pp. 406-409, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 18/6/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994073
Xu W, Duan M, Ahmed M, Mohamad S, Bermak A, Lee YK. A low-cost micro BTU sensor system fabricated by CMOS MEMS technology. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 406-409. 7994073 https://doi.org/10.1109/TRANSDUCERS.2017.7994073
Xu, Wei ; Duan, Mingzheng ; Ahmed, Moaaz ; Mohamad, Saqib ; Bermak, Amine ; Lee, Yi Kuen. / A low-cost micro BTU sensor system fabricated by CMOS MEMS technology. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 406-409
@inproceedings{c65da6da77eb4f9a8bd2e7e63d7ba4d5,
title = "A low-cost micro BTU sensor system fabricated by CMOS MEMS technology",
abstract = "An integrated low-cost micro BTU (μΒΤυ) sensor system, including a thermoresistive micro calorimetric flow (TMCF) sensor and a resistance temperature detector (RTD), is reported for the first time using a proprietary InvenSense CMOS MEMS technology integrated with a digital signal processing (DSP) unit. The proposed BTU sensor features an integrated micro-channel enabling the simultaneous measurement of fluid temperature and flow rates with a sensitivity of 11.1Ω/°C and 0.33 mV/sccm, respectively. This μBTU system achieves a range of 1.5∼15 milli-BTU/h and an accuracy less than 6{\%}. The performance achieved by the μBTU device combined with its high level of integration and low-cost makes it possible to deploy as a sensing node in Internet of Things (IoT) for energy monitoring in smart buildings.",
keywords = "CMOS MEMS, Micro BTU (μBTU) Sensor, RTD, TMCF Sensor",
author = "Wei Xu and Mingzheng Duan and Moaaz Ahmed and Saqib Mohamad and Amine Bermak and Lee, {Yi Kuen}",
year = "2017",
month = "7",
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994073",
language = "English",
pages = "406--409",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - GEN

T1 - A low-cost micro BTU sensor system fabricated by CMOS MEMS technology

AU - Xu, Wei

AU - Duan, Mingzheng

AU - Ahmed, Moaaz

AU - Mohamad, Saqib

AU - Bermak, Amine

AU - Lee, Yi Kuen

PY - 2017/7/26

Y1 - 2017/7/26

N2 - An integrated low-cost micro BTU (μΒΤυ) sensor system, including a thermoresistive micro calorimetric flow (TMCF) sensor and a resistance temperature detector (RTD), is reported for the first time using a proprietary InvenSense CMOS MEMS technology integrated with a digital signal processing (DSP) unit. The proposed BTU sensor features an integrated micro-channel enabling the simultaneous measurement of fluid temperature and flow rates with a sensitivity of 11.1Ω/°C and 0.33 mV/sccm, respectively. This μBTU system achieves a range of 1.5∼15 milli-BTU/h and an accuracy less than 6%. The performance achieved by the μBTU device combined with its high level of integration and low-cost makes it possible to deploy as a sensing node in Internet of Things (IoT) for energy monitoring in smart buildings.

AB - An integrated low-cost micro BTU (μΒΤυ) sensor system, including a thermoresistive micro calorimetric flow (TMCF) sensor and a resistance temperature detector (RTD), is reported for the first time using a proprietary InvenSense CMOS MEMS technology integrated with a digital signal processing (DSP) unit. The proposed BTU sensor features an integrated micro-channel enabling the simultaneous measurement of fluid temperature and flow rates with a sensitivity of 11.1Ω/°C and 0.33 mV/sccm, respectively. This μBTU system achieves a range of 1.5∼15 milli-BTU/h and an accuracy less than 6%. The performance achieved by the μBTU device combined with its high level of integration and low-cost makes it possible to deploy as a sensing node in Internet of Things (IoT) for energy monitoring in smart buildings.

KW - CMOS MEMS

KW - Micro BTU (μBTU) Sensor

KW - RTD

KW - TMCF Sensor

UR - http://www.scopus.com/inward/record.url?scp=85029350389&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85029350389&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2017.7994073

DO - 10.1109/TRANSDUCERS.2017.7994073

M3 - Conference contribution

AN - SCOPUS:85029350389

SP - 406

EP - 409

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - Institute of Electrical and Electronics Engineers Inc.

ER -