A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy

Mingzheng Duan, Wei Xu, Xiaopeng Zhong, Moaaz Ahmed, Yi Kuen Lee, Amine Bermak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents a smart system for large flow range measurement, consisting of a dual-mode MEMS flow sensor and the readout IC. During high flow rate (> 25 m/s), the output of the dual-mode sensor is directly digitized by a switched-capacitor incremental delta-sigma ADC with 12-bits resolution due to its large output amplitude. While in low flow rate, the sensor output is first amplified by a capacitively-coupled instrumentation amplifier (CCIA) before digitization. A comparator is employed to enable a dynamic switching between two operation modes based on the flow rate. The readout IC can handle a large input up to 800 mV and consumes a current as low as 114 μA. The simulation results show the measurement system achieves a maximum sensing flow rate of 73 m/s while contributes a maximum measurement error rate of 300 ppm which is considerably lower than the industry standard of 3%.

Original languageEnglish
Title of host publication2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Volume2018-May
ISBN (Electronic)9781538648810
DOIs
Publication statusPublished - 26 Apr 2018
Event2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Florence, Italy
Duration: 27 May 201830 May 2018

Other

Other2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018
CountryItaly
CityFlorence
Period27/5/1830/5/18

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Keywords

  • dual-mode flow sensor
  • large flow range
  • readout IC

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Duan, M., Xu, W., Zhong, X., Ahmed, M., Lee, Y. K., & Bermak, A. (2018). A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy. In 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings (Vol. 2018-May). [8351324] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISCAS.2018.8351324