A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy

Mingzheng Duan, Wei Xu, Xiaopeng Zhong, Moaaz Ahmed, Yi Kuen Lee, Amine Bermak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents a smart system for large flow range measurement, consisting of a dual-mode MEMS flow sensor and the readout IC. During high flow rate (> 25 m/s), the output of the dual-mode sensor is directly digitized by a switched-capacitor incremental delta-sigma ADC with 12-bits resolution due to its large output amplitude. While in low flow rate, the sensor output is first amplified by a capacitively-coupled instrumentation amplifier (CCIA) before digitization. A comparator is employed to enable a dynamic switching between two operation modes based on the flow rate. The readout IC can handle a large input up to 800 mV and consumes a current as low as 114 μA. The simulation results show the measurement system achieves a maximum sensing flow rate of 73 m/s while contributes a maximum measurement error rate of 300 ppm which is considerably lower than the industry standard of 3%.

Original languageEnglish
Title of host publication2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Volume2018-May
ISBN (Electronic)9781538648810
DOIs
Publication statusPublished - 26 Apr 2018
Event2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Florence, Italy
Duration: 27 May 201830 May 2018

Other

Other2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018
CountryItaly
CityFlorence
Period27/5/1830/5/18

Fingerprint

Flow measurement
Flow rate
Sensors
Analog to digital conversion
Measurement errors
MEMS
Capacitors
Industry

Keywords

  • dual-mode flow sensor
  • large flow range
  • readout IC

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Duan, M., Xu, W., Zhong, X., Ahmed, M., Lee, Y. K., & Bermak, A. (2018). A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy. In 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings (Vol. 2018-May). [8351324] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISCAS.2018.8351324

A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy. / Duan, Mingzheng; Xu, Wei; Zhong, Xiaopeng; Ahmed, Moaaz; Lee, Yi Kuen; Bermak, Amine.

2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings. Vol. 2018-May Institute of Electrical and Electronics Engineers Inc., 2018. 8351324.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Duan, M, Xu, W, Zhong, X, Ahmed, M, Lee, YK & Bermak, A 2018, A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy. in 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings. vol. 2018-May, 8351324, Institute of Electrical and Electronics Engineers Inc., 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018, Florence, Italy, 27/5/18. https://doi.org/10.1109/ISCAS.2018.8351324
Duan M, Xu W, Zhong X, Ahmed M, Lee YK, Bermak A. A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy. In 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings. Vol. 2018-May. Institute of Electrical and Electronics Engineers Inc. 2018. 8351324 https://doi.org/10.1109/ISCAS.2018.8351324
Duan, Mingzheng ; Xu, Wei ; Zhong, Xiaopeng ; Ahmed, Moaaz ; Lee, Yi Kuen ; Bermak, Amine. / A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy. 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings. Vol. 2018-May Institute of Electrical and Electronics Engineers Inc., 2018.
@inproceedings{153a09b022e244d1a8dec26fa8a8aaf7,
title = "A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy",
abstract = "This paper presents a smart system for large flow range measurement, consisting of a dual-mode MEMS flow sensor and the readout IC. During high flow rate (> 25 m/s), the output of the dual-mode sensor is directly digitized by a switched-capacitor incremental delta-sigma ADC with 12-bits resolution due to its large output amplitude. While in low flow rate, the sensor output is first amplified by a capacitively-coupled instrumentation amplifier (CCIA) before digitization. A comparator is employed to enable a dynamic switching between two operation modes based on the flow rate. The readout IC can handle a large input up to 800 mV and consumes a current as low as 114 μA. The simulation results show the measurement system achieves a maximum sensing flow rate of 73 m/s while contributes a maximum measurement error rate of 300 ppm which is considerably lower than the industry standard of 3{\%}.",
keywords = "dual-mode flow sensor, large flow range, readout IC",
author = "Mingzheng Duan and Wei Xu and Xiaopeng Zhong and Moaaz Ahmed and Lee, {Yi Kuen} and Amine Bermak",
year = "2018",
month = "4",
day = "26",
doi = "10.1109/ISCAS.2018.8351324",
language = "English",
volume = "2018-May",
booktitle = "2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - GEN

T1 - A Dual-mode Flow Measurement System for Large Sensing Range with High Accuracy

AU - Duan, Mingzheng

AU - Xu, Wei

AU - Zhong, Xiaopeng

AU - Ahmed, Moaaz

AU - Lee, Yi Kuen

AU - Bermak, Amine

PY - 2018/4/26

Y1 - 2018/4/26

N2 - This paper presents a smart system for large flow range measurement, consisting of a dual-mode MEMS flow sensor and the readout IC. During high flow rate (> 25 m/s), the output of the dual-mode sensor is directly digitized by a switched-capacitor incremental delta-sigma ADC with 12-bits resolution due to its large output amplitude. While in low flow rate, the sensor output is first amplified by a capacitively-coupled instrumentation amplifier (CCIA) before digitization. A comparator is employed to enable a dynamic switching between two operation modes based on the flow rate. The readout IC can handle a large input up to 800 mV and consumes a current as low as 114 μA. The simulation results show the measurement system achieves a maximum sensing flow rate of 73 m/s while contributes a maximum measurement error rate of 300 ppm which is considerably lower than the industry standard of 3%.

AB - This paper presents a smart system for large flow range measurement, consisting of a dual-mode MEMS flow sensor and the readout IC. During high flow rate (> 25 m/s), the output of the dual-mode sensor is directly digitized by a switched-capacitor incremental delta-sigma ADC with 12-bits resolution due to its large output amplitude. While in low flow rate, the sensor output is first amplified by a capacitively-coupled instrumentation amplifier (CCIA) before digitization. A comparator is employed to enable a dynamic switching between two operation modes based on the flow rate. The readout IC can handle a large input up to 800 mV and consumes a current as low as 114 μA. The simulation results show the measurement system achieves a maximum sensing flow rate of 73 m/s while contributes a maximum measurement error rate of 300 ppm which is considerably lower than the industry standard of 3%.

KW - dual-mode flow sensor

KW - large flow range

KW - readout IC

UR - http://www.scopus.com/inward/record.url?scp=85057102053&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85057102053&partnerID=8YFLogxK

U2 - 10.1109/ISCAS.2018.8351324

DO - 10.1109/ISCAS.2018.8351324

M3 - Conference contribution

AN - SCOPUS:85057102053

VL - 2018-May

BT - 2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

ER -