A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates

Bin Guo, Amine Bermak, Philip C.H. Chan, Gui Zhen Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck Microelectromechanical Systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700 °C - 950 °C annealing process was carried out on the 190×190 μm2 MHP with 2.8 μm Polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950 °C annealed MHP has the largest curvature of 2.438 cm-1 and the highest thermal efficiency of 12.76 °C/mW. The proposed process is used to fabricate a 4×4 tin oxide gas sensor array. Experimental result on the response of the sensor array to Ethanol gas is also illustrated in this paper.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages224-227
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2006
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 22 Oct 200625 Oct 2006

Publication series

NameProceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period22/10/0625/10/06

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Keywords

  • Convex microhotplates
  • Gas sensor array
  • Membrane stress
  • Tin oxide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Guo, B., Bermak, A., Chan, P. C. H., & Yan, G. Z. (2006). A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates. In 2006 5th IEEE Conference on Sensors (pp. 224-227). [4178600] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.355762