A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates

Bin Guo, Amine Bermak, Philip C H Chan, Gui Zhen Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck Microelectromechanical Systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700 °C - 950 °C annealing process was carried out on the 190×190 μm2 MHP with 2.8 μm Polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950 °C annealed MHP has the largest curvature of 2.438 cm-1 and the highest thermal efficiency of 12.76 °C/mW. The proposed process is used to fabricate a 4×4 tin oxide gas sensor array. Experimental result on the response of the sensor array to Ethanol gas is also illustrated in this paper.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages224-227
Number of pages4
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 22 Oct 200625 Oct 2006

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period22/10/0625/10/06

Fingerprint

Sensor arrays
Tin oxides
Chemical sensors
Machining
Polysilicon
MEMS
Electric power utilization
Ethanol
Annealing
Membranes
Fabrication
Gases
Temperature
Hot Temperature

Keywords

  • Convex microhotplates
  • Gas sensor array
  • Membrane stress
  • Tin oxide

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Guo, B., Bermak, A., Chan, P. C. H., & Yan, G. Z. (2006). A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates. In 2006 5th IEEE Conference on Sensors (pp. 224-227). [4178600] https://doi.org/10.1109/ICSENS.2007.355762

A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates. / Guo, Bin; Bermak, Amine; Chan, Philip C H; Yan, Gui Zhen.

2006 5th IEEE Conference on Sensors. 2006. p. 224-227 4178600.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Guo, B, Bermak, A, Chan, PCH & Yan, GZ 2006, A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates. in 2006 5th IEEE Conference on Sensors., 4178600, pp. 224-227, 2006 5th IEEE Conference on Sensors, Daegu, Korea, Republic of, 22/10/06. https://doi.org/10.1109/ICSENS.2007.355762
Guo B, Bermak A, Chan PCH, Yan GZ. A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates. In 2006 5th IEEE Conference on Sensors. 2006. p. 224-227. 4178600 https://doi.org/10.1109/ICSENS.2007.355762
Guo, Bin ; Bermak, Amine ; Chan, Philip C H ; Yan, Gui Zhen. / A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates. 2006 5th IEEE Conference on Sensors. 2006. pp. 224-227
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