A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing

Bin Guo, Amine Bermak, Philip C.H. Chan, Gui Zhen Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a monolithic 4×4 tin oxide gas sensor array together with on-chip multiplexing and differential read-out circuitry. In contrast to the conventional voltage divider read-out technique, a novel differential read-out circuit (DRC) for tin oxide gas sensors is proposed. The output of the DRC is simply proportional to the difference between the voltage on the two electrodes of the sensor but not to the transistor parameters such as mobility and threshold voltage, neither to the supply voltage. A robust fabrication process focusing on the integration of the CMOS circuitry and the MEMS structures is described. The monolithic sensor array and its processing circuitry have been implemented in our in-house 5 μm process. Experimental results showed good linearity at the output of the DRC for a wide range of sensor resistance variation (over 20 MΩ). Results also show good thermal characteristic leading to only 15.5 mW power consumption for 300°C operating temperature.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Microelectronics, ICM
Pages9-12
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2006
Event2006 International Conference on Microelectronics, ICM 2006 - Dhahran, Saudi Arabia
Duration: 16 Dec 200619 Dec 2006

Publication series

NameProceedings of the International Conference on Microelectronics, ICM

Other

Other2006 International Conference on Microelectronics, ICM 2006
CountrySaudi Arabia
CityDhahran
Period16/12/0619/12/06

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Keywords

  • Differential readout
  • Gas sensor array
  • Monolithic integration
  • Tin oxide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Guo, B., Bermak, A., Chan, P. C. H., & Yan, G. Z. (2006). A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing. In Proceedings of the International Conference on Microelectronics, ICM (pp. 9-12). [4243635] (Proceedings of the International Conference on Microelectronics, ICM). https://doi.org/10.1109/ICM.2006.373641