A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing

Bin Guo, Amine Bermak, Philip C H Chan, Gui Zhen Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a monolithic 4×4 tin oxide gas sensor array together with on-chip multiplexing and differential read-out circuitry. In contrast to the conventional voltage divider read-out technique, a novel differential read-out circuit (DRC) for tin oxide gas sensors is proposed. The output of the DRC is simply proportional to the difference between the voltage on the two electrodes of the sensor but not to the transistor parameters such as mobility and threshold voltage, neither to the supply voltage. A robust fabrication process focusing on the integration of the CMOS circuitry and the MEMS structures is described. The monolithic sensor array and its processing circuitry have been implemented in our in-house 5 μm process. Experimental results showed good linearity at the output of the DRC for a wide range of sensor resistance variation (over 20 MΩ). Results also show good thermal characteristic leading to only 15.5 mW power consumption for 300°C operating temperature.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Microelectronics, ICM
Pages9-12
Number of pages4
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 International Conference on Microelectronics, ICM 2006 - Dhahran, Saudi Arabia
Duration: 16 Dec 200619 Dec 2006

Other

Other2006 International Conference on Microelectronics, ICM 2006
CountrySaudi Arabia
CityDhahran
Period16/12/0619/12/06

Fingerprint

Sensor arrays
Tin oxides
Chemical sensors
Networks (circuits)
Processing
Voltage dividers
Sensors
Electric potential
Threshold voltage
Multiplexing
MEMS
Transistors
Electric power utilization
Fabrication
Electrodes
Temperature

Keywords

  • Differential readout
  • Gas sensor array
  • Monolithic integration
  • Tin oxide

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Guo, B., Bermak, A., Chan, P. C. H., & Yan, G. Z. (2006). A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing. In Proceedings of the International Conference on Microelectronics, ICM (pp. 9-12). [4243635] https://doi.org/10.1109/ICM.2006.373641

A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing. / Guo, Bin; Bermak, Amine; Chan, Philip C H; Yan, Gui Zhen.

Proceedings of the International Conference on Microelectronics, ICM. 2006. p. 9-12 4243635.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Guo, B, Bermak, A, Chan, PCH & Yan, GZ 2006, A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing. in Proceedings of the International Conference on Microelectronics, ICM., 4243635, pp. 9-12, 2006 International Conference on Microelectronics, ICM 2006, Dhahran, Saudi Arabia, 16/12/06. https://doi.org/10.1109/ICM.2006.373641
Guo B, Bermak A, Chan PCH, Yan GZ. A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing. In Proceedings of the International Conference on Microelectronics, ICM. 2006. p. 9-12. 4243635 https://doi.org/10.1109/ICM.2006.373641
Guo, Bin ; Bermak, Amine ; Chan, Philip C H ; Yan, Gui Zhen. / A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing. Proceedings of the International Conference on Microelectronics, ICM. 2006. pp. 9-12
@inproceedings{39820877cb33404387b00a7cf4c84420,
title = "A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing",
abstract = "This paper presents a monolithic 4×4 tin oxide gas sensor array together with on-chip multiplexing and differential read-out circuitry. In contrast to the conventional voltage divider read-out technique, a novel differential read-out circuit (DRC) for tin oxide gas sensors is proposed. The output of the DRC is simply proportional to the difference between the voltage on the two electrodes of the sensor but not to the transistor parameters such as mobility and threshold voltage, neither to the supply voltage. A robust fabrication process focusing on the integration of the CMOS circuitry and the MEMS structures is described. The monolithic sensor array and its processing circuitry have been implemented in our in-house 5 μm process. Experimental results showed good linearity at the output of the DRC for a wide range of sensor resistance variation (over 20 MΩ). Results also show good thermal characteristic leading to only 15.5 mW power consumption for 300°C operating temperature.",
keywords = "Differential readout, Gas sensor array, Monolithic integration, Tin oxide",
author = "Bin Guo and Amine Bermak and Chan, {Philip C H} and Yan, {Gui Zhen}",
year = "2006",
doi = "10.1109/ICM.2006.373641",
language = "English",
isbn = "1424407656",
pages = "9--12",
booktitle = "Proceedings of the International Conference on Microelectronics, ICM",

}

TY - GEN

T1 - A 4 × 4 tin oxide gas sensor array with on-chip signal pre-processing

AU - Guo, Bin

AU - Bermak, Amine

AU - Chan, Philip C H

AU - Yan, Gui Zhen

PY - 2006

Y1 - 2006

N2 - This paper presents a monolithic 4×4 tin oxide gas sensor array together with on-chip multiplexing and differential read-out circuitry. In contrast to the conventional voltage divider read-out technique, a novel differential read-out circuit (DRC) for tin oxide gas sensors is proposed. The output of the DRC is simply proportional to the difference between the voltage on the two electrodes of the sensor but not to the transistor parameters such as mobility and threshold voltage, neither to the supply voltage. A robust fabrication process focusing on the integration of the CMOS circuitry and the MEMS structures is described. The monolithic sensor array and its processing circuitry have been implemented in our in-house 5 μm process. Experimental results showed good linearity at the output of the DRC for a wide range of sensor resistance variation (over 20 MΩ). Results also show good thermal characteristic leading to only 15.5 mW power consumption for 300°C operating temperature.

AB - This paper presents a monolithic 4×4 tin oxide gas sensor array together with on-chip multiplexing and differential read-out circuitry. In contrast to the conventional voltage divider read-out technique, a novel differential read-out circuit (DRC) for tin oxide gas sensors is proposed. The output of the DRC is simply proportional to the difference between the voltage on the two electrodes of the sensor but not to the transistor parameters such as mobility and threshold voltage, neither to the supply voltage. A robust fabrication process focusing on the integration of the CMOS circuitry and the MEMS structures is described. The monolithic sensor array and its processing circuitry have been implemented in our in-house 5 μm process. Experimental results showed good linearity at the output of the DRC for a wide range of sensor resistance variation (over 20 MΩ). Results also show good thermal characteristic leading to only 15.5 mW power consumption for 300°C operating temperature.

KW - Differential readout

KW - Gas sensor array

KW - Monolithic integration

KW - Tin oxide

UR - http://www.scopus.com/inward/record.url?scp=46749115159&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=46749115159&partnerID=8YFLogxK

U2 - 10.1109/ICM.2006.373641

DO - 10.1109/ICM.2006.373641

M3 - Conference contribution

AN - SCOPUS:46749115159

SN - 1424407656

SN - 9781424407651

SP - 9

EP - 12

BT - Proceedings of the International Conference on Microelectronics, ICM

ER -